| 摘要 |
PROBLEM TO BE SOLVED: To make discriminable surface defects, internal defects and the like by using both optical flaw detection and ultrasonic flaw detection and comparing detected results of an equal position of a specimen. SOLUTION: A light 52 is radiated from a light source 50 to the surface of a specimen 10. A reflecting light 54 is received by a light-receiving element 56. A signal-processing device 58 detects surface defects of the surface of the specimen 10 in a discrimination process based on an intensity change of the received signals. An ultrasonic wave-transmitting element 60 and an ultrasonic wave-receiving element 62 are arranged to a position not interfering the optical flaw detection to the specimen 10. Ultrasonic waves are emitted into the specimen 10 and, the signal-processing device 58 detects internal defects of the specimen 10 in a discrimination process based on a receive intensity change of the receiving element 62. Thereafter, the two flaw detection results for an equal position on the surface of the specimen 10 are compared with each other. The presence/absence and types of defects (whether the defect is the surface defect or internal defect) are judged for each position on the surface of the specimen 10 in accordance with specific procedures on the basis of whether or not defects are detected by the optical flaw detection and ultrasonic flaw detection.
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