| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high sensitivity and high resolution by incorporating a silicone-contg. polymer having a specified siloxane structure, a compd. which produces an acid by irradiation with active rays or a radiation, and a specified polymer. SOLUTION: The compsn. contains a polymer having a structure expressed by formula I and/or formula II which is insoluble with water and soluble with alkali, a compd. which produces an acid by irradiation with active rays or a radiation, and a polymer expressed by formula III. In formulae, X is selected from groups expressed by -C(=O)-R or the like or carboxyl groups, R is hydrogen atom or a hydrocarbon group, R' to R""' are selected from hydroxyl groups or alkyl groups, Y is an alkyl group or the like, R0 is selected from hydrogen atom, a halogen atom or the like, and each of l, m, n and q is 0 or a positive integer, p is a positive integer, each of R1 to R3 and R5 to R7 is hydrogen atom or the like, and each of R4 and R8 is a specified divalent to pentavelent group. |
