| 摘要 |
PROBLEM TO BE SOLVED: To reduce changes in characteristics due to the support of a piezoelectric plate and to make a structure superior in resistance to vibrations and impacts by axially symmetrically forming a driving electrode and detecting electrodes in a piezoelectric plate and providing a concentric ring-shaped recessed groove in the back surface of the piezoelectric plate. SOLUTION: In this oscillator, a driving electrode 3 and detecting electrodes 4 and 5 are axially symmetrically formed in a piezoelectric plate 1 using lead zirconate- and lead titanate-based ceramics, and a recessed groove 2 is formed concentrically with the center axes of the driving electrode 3 and the detecting electrodes 4 and 5 in the back surface of the piezoelectric plate 1. At this time, in each electrode, Ag paste is formed by a screen printing method, etc., and is subjected to a polarizing process. In addition, the recessed groove 2 is vertically moved in the directions of arrows 7 and is worked on as rotating a predetermined ring-shaped magnet 6. At this time, an abrasive such as diamond is used for the abrasive part of the magnet 6, and it is possible to obtain a predetermined accuracy in work and processing time by selecting the size and number of rotation of the magnet 6. In addition, by providing the ring-shaped recessed groove 2, it is possible to improve impedance characteristics and to obtain an oscillator capable of being used for a piezoelectric oscillation gyro. |
