| 摘要 |
PROBLEM TO BE SOLVED: To perform stable, high-sensitivity surface shape detection in a high- reliability state without any dielectric breakdown due to static electricity generated at the time of sensing. SOLUTION: This sensor for surface shape recognition is equipped with an earth 106 having an exposure part formed in a lattice shape on a passivation film surface on an inter-layer insulating film 104 formed on a lower-layer insulating film 102 on a semiconductor substrate 101, and a sensor electrode 105 of, for example, 80 μm square are arranged at the center parts of a square. The passivation film 107 is formed covering the sensor electrode 105. When a material whose specific dielectric constant is 4 is used for the passivation film 107 and the sensor electrode 105 on them is 2 μm thick, the sensor electrode 105 and earth electrode (fixed electrode) 106 are at a distance of 2 μm. |
