| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to form a high Q inductor having a low series resistance component, which is not subjected to skin effect on an IC by a method wherein an inductor part, which is composed of one layer of wiring layer is multilayered. SOLUTION: Multilayered inductors 11 and 14 are arranged, they are connected with each other, and using a part of the second layer of wiring layer 1r as an inductor, a series resistance component is reduced by increasing the cross sectional area where the current of inductor flows. Also, by having the inductors in double layer, they are not subjected to the affection of the skin effect in a high frequency region.
|
