发明名称 DIFFUSION SIMULATION METHOD
摘要 PROBLEM TO BE SOLVED: To prevent generation of non-physical negative diffusion seed density by estimating a specific value of a mesh point of lower diffusion seed density out of mesh points of both ends of a mesh branch, lower than an actual value, to constitute Jacobian when a physical equation of specific condition is solved numerically with the use of the Newton's method. SOLUTION: When a physical equation, in which a diffusion constant DA of a diffusion seed A is varied in dependence on diffusion seed density CA andδDA/δCA is positive, is solved numerically with the use of the Newton's method, formulas I and II, in which differential coefficient of the diffusion constant DA is multiplied by a correction factor U(x) in which high-low relation of diffusion seed density CA(i) and CA(j) of both end points of a mesh branch is reflected, and a value ofδDA/δCA at a mesh point of lower diffusion seed density CA(i) is estimated lower than an actual value, are used to calculate, and Jacobian is constituted. As a result, non-physical negative diffusion seed density is prevented from generated in an iterative process of the Newton's method.
申请公布号 JP2000232074(A) 申请公布日期 2000.08.22
申请号 JP19990031184 申请日期 1999.02.09
申请人 NEC CORP 发明人 KUMASHIRO SHIGETAKA
分类号 H01L21/22;H01L21/00;(IPC1-7):H01L21/22 主分类号 H01L21/22
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