| 摘要 |
PROBLEM TO BE SOLVED: To evaluate a contact state in order to inspect and evaluate the inside of a semiconductor element in a semiconductor evaluation apparatus. SOLUTION: A probe P11 and a probe P12 are used to evaluate the element characteristic inside a semiconductor device 100. A probe P21 and a probe P22 are used to evaluate the contact state of the probes P11, P12 with external lead terminals 101, A switch SW, a switch SW, a fixed resistance R, a fixed resistance R, a current measuring part 8, and a current measuring part 8 which, are connected in series with a power supply 7 and a power supply 7, as well as a voltage measuring part 9 and a voltage measuring part 9 which are connected in parallel with the power supplies 7, are installed in electric routes across the probes P11 and P21 and in electric routes across the probes P12 and P22. A power supply 4, a voltage measuring part 5 and a current measuring part 6 are installed in electric routes across the probes P11, P12.
|
