| 摘要 |
PROBLEM TO BE SOLVED: To provide the thickness monitor device which can measure the thickness of a mixed film, vapor-deposited on the surface of a traveling film in a vacuum tank, by compositions continuously online. SOLUTION: The device is equipped with an X-ray generating device 7a which irradiates the mixed film with primary X rays, characteristic X-ray measuring means 7b and 7c which measure the intensity of characteristic (fluorescent) X rays excited by the irradiation with the primary X rays, a standard plate moving means 7d which moves standard samples having known characteristics so that they enter and exit from the irradiation optical path of the primary X rays, a correcting device 14 which corrects the characteristic X-ray intensity measured by the means 7b and 7c according to the measured value of the characteristic X-ray intensity obtained from the standard samples, and a mixed film thickness output means 15 which outputs the thicknesses of the mixed film by components on the basis of the characteristic X-ray intensity having been corrected.
|
