| 摘要 |
PROBLEM TO BE SOLVED: To improve suction and discharge responses and discharge accuracy and to achieve fine control by driving a diaphragm with an enlargement mechanism where a lamination piezoelectric actuator is incorporated for changing the volume of a pump chamber and sucking and discharging liquid into a nozzle. SOLUTION: A voltage is applied to a lamination voltage actuator 3 of an enlargement mechanism 2a, a diaphragm 7 is moved toward the left via a transmission member 5 for reducing the volume of a pump chamber 8, and air is discharged from the tip of a nozzle 10. Then, the tip of the nozzle 10 is brought into contact with liquid 12 in a container 11 for reducing a voltage that is applied to the actuator 3, thus moving the diaphragm 7 to the right due to the pull of a spring 4 and increasing the volume of the pump chamber 8 for setting to a negative pressure and hence sucking the liquid 12 from the tip of the nozzle 10. Therefore, the nozzle 10 is moved to a location for discharging the liquid 12, the application voltage of the actuator 3 is increased for moving the diaphragm 7 to the left, and the volume of the pump chamber 8 is reduced for discharging the liquid 12. |
