ARRANGEMENT OF NONEVAPORATION TYPE GETTER

摘要

PROBLEM TO BE SOLVED: To provide a method for easily arranging a nonevaporation type getter in various shapes in a position near a gas releasing source. SOLUTION: A metal film 12 is formed on a substrate 11. Nonevaporation type getter powder material 15 mainly containing zirconium or titan, or containing both of zirconium and titan is bonded on the metal film 12 formed on the substrate 11 by pressure, and then the nonevaporation type getter powder material 15 is fixed on the metal film 12. Or the nonevaporation type getter powder material 15 is heated by pressing so as to be fixed on the metal film 12.