| 摘要 |
PROBLEM TO BE SOLVED: To enable ion beam extraction in a large area, suppress size increase of an ion beam source and facilitate the working of a drawn electrode system by forming each electrode constituting a drawn electrode system in a flat shape or rectangular shape and shaping an electrode plate in a convex shape downward. SOLUTION: In this ion beam radiating device, an extracting electrode system 10 has electrodes 11-13 formed with a plurality of ion extracting holes 14 respectively. The respective electrodes 11-13 are rectangular in a top view and have an electrode plate in a convex shape downward. In other words, the respective electrodes 11-13 have a shape of one part of a cylinder or elliptic cylinder cut in the longitudinal direction. An ion beam 16 can be radiated in the width W direction of the respective electrodes 11-13 so that the extraction of the ion beam 16 in a large area is possible without enlarging the dimension in the width W direction of the respective electrodes 11-13 so much.
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