| 摘要 |
PROBLEM TO BE SOLVED: To make properly supportable the load on a slider, make bearable a high load and improve the positioning accuracy, disassembling capability, attenuation performance, high speed performance, etc. SOLUTION: This two-dimensional motion mechanism is provided with a stage 10, a pair of X-axis fixing guide 12, a pair of Y-axis fixing guide 14, an X-axis moving beam 16 movable in the X-axis direction along the X-axis fixing guide 12, a Y-axis moving beam 18 movable in the Y-axis direction along the Y-axis fixing guide 16, a slider 20 movable in the X-axis direction along the Y-axis moving beam 18, an X-axis ball screw 22 for moving the slider 20 in the X-axis direction, a Y-axis ball screw 24 for moving the slider 20 in the Y-axis direction, an X-axis servomotor 26, a Y-axis servomotor 28, and a gap fixing guide 30 fixed to between a pair of the X-axis fixing guides 12 on the stage 10 in parallel to the X-axis fixing guide 12 and guiding the motion of the X-axis moving beam 16 in the X-axis direction. |
