| 摘要 |
PROBLEM TO BE SOLVED: To suppress the wasteful radiation and stably heat a unit by connecting various fluid control apparatuses in the passage direction through passage blocks, thereby constituting one circulation line unit, and installing a heater within a recessed groove provided in the passage direction of each passage block. SOLUTION: Passage blocks 25, 26,... are arranged on a base plate 40 in the passage direction to constitute a circulation line unit A, and as a fluid control apparatus, for example, two shut-off valves and a mass flow controller 18 are loaded on the passage blocks 25, 26.... Recessed grooves are continuously provided on both sides of arranged holes in the center on the passage blocks 25, 26..., and heaters 60 are mounted within the recessed grooves. The passage blocks 25, 26... are mounted on a base plate 40 by fastening screws inserted to screw holes 41 provided on the base plate 40, and heat insulating slits 42 are longitudinally formed in the positions on both sides of the passage blocks on the base plate 40.
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