Storage container for precision substrates

摘要

A storage container for multiple wafers in alignment in its pod, includes: a hollow door element which opens and hermetically closes the open front of the pod; and a guide arrangement for guiding and positioning the door element into the open front when the door element is closed. This guide arrangement is configured of a first inclined guide portion, at least, formed in the underpart of the opening of the pod, gradually going outwards toward the distal end; and a second inclined guide portion, at least, formed in the underpart of the periphery of the door element, gradually going outwards from the inner side to the outer side and coming in contact with the first inclined guide portion when the door element is closed.