| 摘要 |
PROBLEM TO BE SOLVED: To obtain a measuring apparatus which can prevent the degradation of the performance or the appearance quality of a conductive film, by which a surface resistance can be measured simply and in a short time, by which the surface resistance of the conductive film in a local part and the surface resistance of the conductive film in a large area can be measured in a wide range, and which can enhance the accuracy of a measurement. SOLUTION: This measuring apparatus is constituted in such a way that a first electrode 3a which faces a conductive film 2 by keeping a set interval is supported by support members 4, that a second electrode 3b which faces the conductive film in a part different from the part of the conductive film facing the electrode 3a by keeping a set interval is supported by the support members 4, and that a current flows to the conductive film 2 facing both electrodes 3a, 3b by applying an AC voltage across the first electrode 3a and the second electrode 3b. A surface-resistance calculation means 18, by which the surface resistance of the conductive film 2 is calculated on the basis of the current flowing to the conductive film 2, is installed.
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