RETICLE TRANSFER SYSTEM

摘要

A reticle transfer system (100) is disclosed for transferring reticles (110) between a reticle-carrying SMIF container and a process tool. The reticle transfer system includes an arm assembly (124) having a transfer arm (126) and a gripping mechanism (128) affixed to the end of the transfer arm. Once the container (104) carrying the reticle has been opened, the gripping mechanism is rotated and translated to a position adjacent the reticle so that it may access the reticle and transfer it into the minienvironment (120) through an access port in the minienvironment. In order to precisely, easily and repeadtedly position the gripping mechanism in the desired location to grip and transfer the reticle, the gripping mechanism includes four downwardly extending posts (142) spaced apart from each other so as to contact an outer rim (144) of the container door (108) as the gripping mechanism is lowered into position to grip and transfer the reticle.