发明名称 CONDUCTIVE NITRIDE FILM, PROCESS FOR PRODUCING THE SAME, AND ANTIREFLECTION OBJECT
摘要 <p>A conductive nitride film with excellent heat resistance which contains Ti and/or Zr and further contains one or more metals selected from the group consisting of Al, Mo, Cr, Nb, Hf, Ni, Co, Fe, Pd, Ag, Au, and Pt; and an antireflection object comprising the conductive nitride film.</p>
申请公布号 WO2000048204(P1) 申请公布日期 2000.08.17
申请号 JP2000000757 申请日期 2000.02.10
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