发明名称 METHOD FOR PREPARING OF DIAMOND NANO WHISKER
摘要 PURPOSE: A method for preparing diamond nano whisker is provided, which is prepared at the low temperature using mask production in real time and anisotropic etching character of diamond. CONSTITUTION: A method for preparing diamond nano whisker comprises the steps of: deposition process of diamond to form diamond film on the upper part of the board; formation process of mask to be formed as nano size on the upper part of the diamond film using nuclear formation reaction of shaping; formation process of diamond whisker of nano size by etching process using the mask pattern of the nano size as etching mask.
申请公布号 KR20000052285(A) 申请公布日期 2000.08.16
申请号 KR19990018825 申请日期 1999.05.25
申请人 KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY;MYONGJI UNIVERSITY 发明人 BAEK, YOUNG JUN;BAEK, EUN SONG;CHUN, DONG REUL
分类号 B82B3/00;C01B21/06;C01B33/06;C30B25/00;C30B29/04;H01J9/02 主分类号 B82B3/00
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