发明名称 |
METHOD FOR PREPARING OF DIAMOND NANO WHISKER |
摘要 |
PURPOSE: A method for preparing diamond nano whisker is provided, which is prepared at the low temperature using mask production in real time and anisotropic etching character of diamond. CONSTITUTION: A method for preparing diamond nano whisker comprises the steps of: deposition process of diamond to form diamond film on the upper part of the board; formation process of mask to be formed as nano size on the upper part of the diamond film using nuclear formation reaction of shaping; formation process of diamond whisker of nano size by etching process using the mask pattern of the nano size as etching mask. |
申请公布号 |
KR20000052285(A) |
申请公布日期 |
2000.08.16 |
申请号 |
KR19990018825 |
申请日期 |
1999.05.25 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY;MYONGJI UNIVERSITY |
发明人 |
BAEK, YOUNG JUN;BAEK, EUN SONG;CHUN, DONG REUL |
分类号 |
B82B3/00;C01B21/06;C01B33/06;C30B25/00;C30B29/04;H01J9/02 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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