FLUID FILTER IN PROCESS FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: A fluid filter in a process for manufacturing a semiconductor is provided to maximize filtering efficiency, by preventing a serious defect caused by a leakage phenomenon in a specific portion, and by eliminating the need for a plurality of filters. CONSTITUTION: In a fluid filter in a process for manufacturing a semiconductor having a filtering film for filtering impurities included in fluid, inside/outside frames for fixing the filtering film, an O-ring for sealing for preventing a leakage, and a housing for surrounding the filtering film, the frames, and the O-ring, the filter has at least two different filtering films in the housing, the filtering films being composed of a double media structure of a double-fold pleat.