TWIN ANTENNA PLASMA CLEANER,申请号KR20000001353U-传众专利搜索

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发明名称	TWIN ANTENNA PLASMA CLEANER
摘要
申请公布号	KR200193105(Y1)	申请公布日期	2000.08.16
申请号	KR20000001353U	申请日期	2000.01.18
申请人	CHOI, DAI KYU	发明人	CHOI, DAI KYU
分类号	H01L21/02;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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