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发明名称
Method of manufacturing semiconductor device having multilayer wiring
摘要
申请公布号
GB0015731(D0)
申请公布日期
2000.08.16
申请号
GB20000015731
申请日期
1998.06.25
申请人
NEC CORPORATION
发明人
分类号
H01L21/311;H01L21/312;H01L21/3213;H01L21/768
主分类号
H01L21/311
代理机构
代理人
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