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发明名称
Methods and apparatus for treating workpieces with plasmas
摘要
申请公布号
EP0817237(B1)
申请公布日期
2000.08.16
申请号
EP19970116533
申请日期
1994.10.05
申请人
APPLIED MATERIALS, INC.
发明人
HANAWA, HIROJI
分类号
H05H1/46;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
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