ELECTROSTATIC MICRO ACTUATOR HAVING A NONLINEARITY REDUCING STRUCTURE

摘要

PURPOSE: An electrostatic microactuator having comb shaped bodies is provided to improve controlling performance through reducing nonlinearity according to potential by using fingers of different sizes. CONSTITUTION: Sizes of fingers(140) on a comb shaped body(120) of a stator(100) are reduced from both ends toward a central portion. Sizes of fingers(240) on a comb shaped body(220) of a moving body(200) are increased from both ends toward a central portion. Herein, the number of the fingers on the moving body is more than the number of the fingers on the stator by one. Therefore, nonlinearity in size of force generated according to potential is reduced by differentiating sizes of the fingers.