FILTER DEVICE FOR SEMICONDUCTOR EQUIPMENT

摘要

PURPOSE: A filter device for a semiconductor equipment is provided by being able to replace easily a filter members from a filter housing without modifying piping design, and by preventing a leakage of the solution to be supplied from the filter housing. CONSTITUTION: A filter device for the semiconductor equipment consists of: a housing body having a fixed receiving space and having the projecting portion of a ring type at the top of a circumference surface; a filter members to be installed in the housing body; a bottom cover of the housing body connected with a fluid inlet valve for filtered fluid; and a top cover of the housing body connected with a fluid outlet valve for filtered fluid and installed with an external thread portion at the projecting portion of the ring type so as to detach/build-up.