| 摘要 |
PROBLEM TO BE SOLVED: To obtain a plurality of sufficient flat laminar flows, using a small quantity of raw gas flow by providing a gas inlet pipe capable of sufficiently lowering the height of openings in a plurality of gas exhaust ports and thinning a partition panel, without deformation or shift in the partition panel and a sidewall. SOLUTION: In a gas inlet pipe 11, a plurality of gas passages 10a and 10b are laminated which extend from gas inlet ports 17a and 17b positioned at one end of a hollow body to gas exhaust ports 16a and 16b positioned at the other end of the hollow body, and a plurality of the gas passages 10a and 10b are formed as spaces surrounded and formed by a upper metallic plate 12 and a bottom metallic plate 13, a plurality of metallic sidewalls 14a and 14b placed between the upper plate 12 and the bottom plate 13, and a metallic partition plate 15 placed between the sidewalls 14a and 14b.
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