摘要 |
PROBLEM TO BE SOLVED: To provide a heater suitable for raising a liquid temperature by directly immersing it in a liquid tank to store cleaning liquid, polishing liquid or the like. SOLUTION: A rod heater is equipped with a carbon wire heating element 2 selected in a quartz glass tube with a small diameter or a large diameter, the quartz glass tube part 3a, 3b with the small diameter to house a wire carbon material A in a compressed state and to store the end of the carbon wire heating element between the wire carbon materials in a compressed state, and a sealed terminal part 10 stored between the wire carbon materials in the quartz glass tube with the small diameter and having connection wires 11a, 11b to supply power, and the connection wire is electrically connected to the carbon wire heating element through the wire carbon material A. The rod heater using the carbon wire heating element is suitable for raising a liquid temperature by directly immersing it in a liquid tank to store cleaning liquid, polishing liquid or the like. |