发明名称 TRANSMITTED WAVEFRONT MEASURING INSTRUMENT USING REFLECTING MIRROR
摘要 PROBLEM TO BE SOLVED: To easily measure various transmitted wave fronts, such as planar wave fronts, spheric wave fronts, aspheric wave fronts, etc., with accuracy by constituting a reflecting mirror of a mirror which reflects light in the same direction as that of incident light. SOLUTION: As a reflecting mirror which reflects a wave front transmitted through a single lens body or an optical system, such a mirror as the micro corner-cube mirror, rectangular mirror, etc., which reflects light in the same direction as that of incident light is used. The micro corner-cube mirror is composed of a plurality of corner-cube mirrors and has an apex angle of, for example, 90 deg.. Therefore, the mirror can reflect light in the same direction as that of incident light though the phase is shifted from the incident angle. In addition, the phase shifting amount can be reduced by adjusting the diameters of the corner cubes. The rectangular mirror can reflect light in the same direction as that of the incident light though the phase is linearly shifted from the incident light, because rectangular V-grooves are arranged on the mirror.
申请公布号 JP2000227313(A) 申请公布日期 2000.08.15
申请号 JP19990029877 申请日期 1999.02.08
申请人 NIKON CORP 发明人 AOKI KAZUO
分类号 G01B9/02;G01B11/24;(IPC1-7):G01B11/24 主分类号 G01B9/02
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