发明名称 Sensor having a thin film element
摘要 A sensor has a thin film element, the thin film element having a temperature-dependent electrical resistance. The thin film element includes a platinum layer, which is doped with zircon or zircon oxide. The thin film element can be arranged on a membrane to create a mass airflow sensor.
申请公布号 US6101872(A) 申请公布日期 2000.08.15
申请号 US19980036732 申请日期 1998.03.09
申请人 ROBERT BOSCH GMBH 发明人 ZECHNALL, MARTIN;TREUTLER, CHRISTOPH;LEMBKE, MANFRED;HECHT, HANS;MAREK, JIRI;GOEBEL, HERBERT;WILLMANN, MARTIN;GRUBER, HANS-ULRICH;LOCK, ANDREAS;HEYERS, KLAUS;BUTH, JOERG
分类号 G01F1/68;G01F1/684;G01F1/692;G01K7/18;H01L21/822;H01L27/04;(IPC1-7):G01F1/68 主分类号 G01F1/68
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