发明名称 |
System for processing substrates |
摘要 |
A substrate processing system is provided that includes substrate processing vessels, a substrate queuing station, a substrate transfer device, and a processor. The processor, in communication with the processing vessels, the queuing station, and the transfer device, provides selectable single and multi-step processing of the substrates by accessing a process command for a given substrate corresponding to desired processing of the substrate.
|
申请公布号 |
US6103055(A) |
申请公布日期 |
2000.08.15 |
申请号 |
US19950502860 |
申请日期 |
1995.07.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
MAHER, JOSEPH A.;VOWLES, E. JOHN;NAPOLI, JOSEPH D.;ZAFIROPOULO, ARTHUR W.;MILLER, MARK W. |
分类号 |
B65G49/07;H01L21/00;H01L21/677;(IPC1-7):H01L21/00 |
主分类号 |
B65G49/07 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|