SURFACE SHAPE MEASURING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To eliminate measurement error caused by temperature dependency of measuring apparatus during long term measurement. SOLUTION: Data of a measurement start point 2 is measured after measuring the data of the first line 11 by scanning an XY table in X-axis direction and data of measurement start point 2 is measured after data of the second line 12 is measured. This scanning is repeated by turns and the data at every measurement at the measurement start point 2 is compared so that the error caused during the measurement is corrected to measure exact surface shape.