发明名称 Method of making semiconductor device with decreased channel width and constant threshold voltage
摘要 Semiconductor device and method for fabricating the same, is disclosed, which can maintain a threshold voltage constant despite of decreased channel width, the device including a first, and a second conductive type wells in a substrate, a first, and a second gate insulating films on the first, and the second conductive type wells, a first gate electrode on the first gate insulating film, the first gate electrode being doped with a second conductive type except for edges of the first gate electrode in a channel width direction counter doped with a first conductive type, a second gate electrode on the second gate insulating film, the second gate electrode being doped with a first conductive type except for edges of the second gate electrode in a channel width direction counter doped with a second conductive type, and isolating regions formed between the first, and second conductive type wells, the first, and second gate insulating films, and the first, and second gate electrodes.
申请公布号 US6103562(A) 申请公布日期 2000.08.15
申请号 US19990225314 申请日期 1999.01.05
申请人 LG SEMICON CO., LTD. 发明人 SON, JEONG HWAN;KIM, YOUNG GWAN
分类号 H01L29/78;H01L21/336;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;(IPC1-7):H01L21/823 主分类号 H01L29/78
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