发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To form a contact with high reliability in a source/drain region and to form, with high reliability, a silicide layer at a part of the silicon layer which is crystal-grown by contacting to a silicon-contained metal molten liquid. SOLUTION: A silicon layer 22(22s and 22d) wherein a single crystal silicon is crystal-grown by touching a silicon-contained metal molten liquid is provided on a p-well region 13 where one component (source region, drain region of silicon of a semiconductor element (MOS transistor 1) formed on a silicon substrate 11 is formed, with a source region 17 and a drain region 18 formed thick.
申请公布号 JP2000228518(A) 申请公布日期 2000.08.15
申请号 JP19990028064 申请日期 1999.02.05
申请人 SONY CORP 发明人 YAMOTO HISAYOSHI;YAMANAKA HIDEO;KOBAYASHI KAZUYOSHI;SATO YUICHI
分类号 H01L29/78;H01L21/208;H01L21/28;H01L21/8238;H01L27/092;(IPC1-7):H01L29/78;H01L21/823 主分类号 H01L29/78
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