发明名称 Fluid storage and dispensing system
摘要 A fluid storage and dispensing system comprising a vessel for holding a fluid at a desired pressure. The vessel has a pressure regulator associated with a port of the vessel, and set at a predetermined pressure. A dispensing assembly, e.g, including a flow control means such as a valve, is arranged in gas/vapor flow communication with the regulator, whereby the opening of the valve effects dispensing of gas/vapor from the vessel. The fluid in the vessel may be constituted by a liquid which is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g., ambient (room) temperature. A phase separator such as a gas/vapor-permeable liquid-impermeable membrane, may be associated with the regulator, as a barrier to flow of liquid into the regulator, when the contained fluid in the vessel is in a liquid state.
申请公布号 US6101816(A) 申请公布日期 2000.08.15
申请号 US19980067393 申请日期 1998.04.28
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 WANG, LUPING;TOM, GLENN M.
分类号 C23C14/24;C23C16/448;F17C1/00;F17C7/00;F17C7/02;F17C7/04;F17C9/02;F17C11/00;F17C13/00;F17C13/02;F17C13/04;H01L21/205;H01L21/265;H01L21/306;(IPC1-7):F17C7/04 主分类号 C23C14/24
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