SUPPORTING MECHANISM OF SURFACE PLATE FOR POLISHING

摘要

PROBLEM TO BE SOLVED: To make surface processing uniformly and with a high flatness by preventing a surface plate from degradation in the shape resulting from thermal deformation of a hanger board and receptacle seat. SOLUTION: A heat insulation 5 is interposed between an upper surface plate 1 and a hanger board 12 of a hanging tool 10 for upper surface plate so as to shut off the heat path from the upper surface plate 1 to the hanger board 12. Use of such an upper surface plate hanging tool having high rigidity that a plurality of ribs are extending from a cylindrical portion radially at a certain spacing in the circumferential direction allows suppressing the static deformation even in case the surface plate 1 is made of Fe-Ni alloy, etc. It may also be acceptable that the heat insulation 5 is pinched between a lower surface plate and a receptacle seat. Accordingly the degree of flatness of the surface plate working area is well maintained during the processing, and a wafer can be finished into a uniform surface condition.