| 摘要 |
PROBLEM TO BE SOLVED: To form a protecting film having electric conductivity and a hydrophilic surface by generating the plasma of reactive gas to form a substrate film on the surface of a member and generating the plasma of gaseous hydrocarbon to form a diamondlike carbon film on the substrate film. SOLUTION: Space (plasma space) between a pair of electrodes 3-1 and 3-2 provided by being away each other on one end side and the other end side of a reaction space 8 is provided with a substrate 1 whose surface is composed of an inorganic material or an organic matter, the pressure in the reaction space is reduced, and reactive gas is fed from a gas system 30. For the convertion of the reactive gas, respective electrode 3-1 and 3-2 are fed with electromagnetic energy of prescribed electric C power and frequency via the feeding means 15-1 and 15-2 therefore and matching boxes 16-1 and 16-2. So that respective electrode 3-1 and 3-2 can be applied with alternating voltage symmetrical each other or of the same phase, adjusting and controlling are executed with a phase adjuster 26. Then, a substrate film on the surface of the substrate 1 and a diamondlike carbon film thereon are formed. |
