发明名称 |
Filter sheet for purifying photoresist composition |
摘要 |
A filter sheet is provided which comprises a self-supporting fibrous matrix having immobilized therein particulate filter aid and particulate ion exchange resin, wherein said particulate filter aid and particulate ion exchange resin are distributed substantially uniformly throughout a cross-section of said matrix. A process for removing ionic impurities from a photoresist solution is also provided which comprises passing the photoresist solution through said filter sheet to remove ionic impurities therefrom.
|
申请公布号 |
US6103122(A) |
申请公布日期 |
2000.08.15 |
申请号 |
US19970903101 |
申请日期 |
1997.07.30 |
申请人 |
CUNO INCORPORATED |
发明人 |
HOU, KENNETH C.;OSTREICHER, EUGENE A.;SALE, RICHARD D. |
分类号 |
B01D39/14;A61K38/00;B01D15/04;B01D15/08;B01D39/18;B01J20/26;B01J20/28;B01J39/20;B01J47/00;B01J47/12;(IPC1-7):B01D39/18 |
主分类号 |
B01D39/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|