发明名称 PROCESSING DEVICE FOR PROCESSING STRIP-LIKE SUBSTRATE WITH GAS
摘要 PROBLEM TO BE SOLVED: To form a variety of different patterns at the cost as small as possible by providing a pattern carrier of an endless pattern belt, and guiding it in an annular manner by direction-changing rollers. SOLUTION: A strip-like substrate 1 on which metal is vapor-deposited is guided by a covering roller 4 to change the direction by 180 deg.. A processing device 2 has a gas source 5 as a vaporizing container, and the gas source has a gas outlet 6, and contains a medium to generate gas 3. A pattern belt 7 is arranged around the gas source 5, and held in an annular manner by direction- changing rollers 8-11, the direction-changing roller 11 is driven by a motor 12, and the pattern belt 7 is driven at the same peripheral speed as that of the substrate 1. The covering roller 4 presses the pattern belt 7 slightly downward between the direction-changing rollers 9 and 10. The pattern belt 7 is surely pressed to the substrate 1. Heaters 15 and 16 to heat the pattern belt 7 to the temperature higher than the condensation temperature of the gas 3 are arranged.
申请公布号 JP2000226656(A) 申请公布日期 2000.08.15
申请号 JP20000002947 申请日期 2000.01.11
申请人 LEYBOLD SYST GMBH 发明人 DETLEV ERAA
分类号 B05D1/26;B05C1/00;C23C14/04;C23C14/24;C23C14/56;(IPC1-7):C23C14/56 主分类号 B05D1/26
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