| 摘要 |
PROBLEM TO BE SOLVED: To prevent the retention part of fluid from being formed in the fluid heater of a quartz double pipe structure. SOLUTION: Three pipe bodies 17 and 21 made of quartz glass are inserted into the cylindrical tubular part 10 of a tubular body A1 made of quartz glass. Into these pipe bodies respectively, halogen lamps are inserted. To the tubular body A1, an inlet pipe 15a having a fluid inlet port 15 and an outlet pipe 16a having a fluid outlet port 16 are attached. In this case, the inlet pipe 15a is attached in an inclined manner so as to intersect the axial direction of the tubular body A1. Thus, fluid entering through the inlet pipe 15a rotates and flows along the inner wall of the tubular part 10 of the tubular body A1, so that it is not retained.
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