FLUID FLOW CONTROLLER

摘要

PROBLEM TO BE SOLVED: To provide a fluid flow controller capable of attaining cost-down, being disposable and identifying a fluid by making the configuration of a flow sensor head part simple and compact while highly accurately controlling the distribution of the fluid by highly accurately detecting a fine flow rate. SOLUTION: This device is provided with a flow sensor head part 208 attached to a casing 206 having a conduit 202, a means for regulating the distribution of the fluid in the conduit 202 and a control means for calculating the flow rate value of the fluid in the conduit 202 on the basis of an electric signal from the head part 208 and controlling a fluid distribution regulating means. An electrode terminal 52 of the head part 208 and an electrode terminal 210a of a connector 214 are electrically connected/disconnected by attaching/detaching the connector 214 to/from the casing 206. The control means controls the fluid distribution regulating means so that the calculated flow rate value of the fluid in the conduit 202 can be a target flow rate value on the basis of the calculated flow rate value and the target flow rate value.