Integrated scanner on a common substrate

摘要

A light scanning system formed on a common substrate comprises a light scanner and a sensor. The light scanner scans light across a target. The sensor detects light reflected from the target and creates a signal representative of the detected light. The light scanner may include a light source and a deflector, such as a micro-machined scan module. The micro-machined scan module may comprise an electrode, a support mounted on the electrode, and a mirror element mounted at one end of the support, wherein a voltage applied between the electrode and mirror element bends the mirror element.