| 摘要 |
PROBLEM TO BE SOLVED: To prevent the breakdown of a piezoelectric layer in the border part between a pressure generation chamber and a peripheral wall from occurring. SOLUTION: This recording head comprises a pressure generation chamber 12 communicating with a nozzle opening, a lower electrode 60 provided in a corresponding region to the pressure generation chamber 12, a piezoelectric layer 70 formed on the lower electrode 60 and an upper electrode 80 formed on the surface of the piezoelectric layer 70. In addition, the recording head is equipped with a piezoelectric element having a piezoelectric active part 320 which is substantially a drive part, formed in an opposite region to the pressure generation chamber 12. In this case, the piezoelectric layer 70 constituting the piezoelectric active part 320 and the upper electrode 80 are installed extending from the opposite region to the pressure generation chamber 12 to the outside of the region. Further, a thick film part 85 having a larger thickness than the other part is formed in a corresponding region to the border part between the end part of the pressure generation chamber 12 of the upper electrode 80 and a peripheral wall. Thus the breakdown of the piezoelectric layer 70 is prevented from occurring.
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