| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing stably a optoelectric transducer element by forming a pn joint through thermal diffusion by using a compound semiconductor crystal substrate made of 12 (2B) group element and 16 (6B) group element of the periodic table. SOLUTION: A compound semiconductor crystal substrate (p-type ZnTe single crystal board 1) made of 12 (2B) group element and 16 (6B) element of the periodic table is used, and a diffusion source 2 showing a conductivity (n type) different from the substrate is arranged on the surface of the substrate, and then the diffusion source is heated to form a pn joint 5 through the thermal diffusion. In such a method, thanks to the diffusion source 2 arranged on the surface of the substrate, formation of defects compensating a level showing a conductivity different from a substrate which is formed by the diffusion source on the surface during diffusion process, can be prevented, and the diffusion source 2 is made of Al and Si for gettering impurities on the substrate surface. |
