| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer aligner, with which the adhesion of the foreign matters, such as dust, etc., to a mask can be prevented, vacuum suction of water to the mask while the mask is being stored can be prevented, the vacumizing can be performed easily when a reticle is replaced, and throughput can be improved. SOLUTION: A mask vacuum storage 5 is provided on the side of the mask chamber 13 of the main body of this aligner. The vacuum storage 5 is provided with a plurality of housing stands 61a to 61e. A mask storing container 39 is placed on each of the housing stands 61a to 61e respectively. A stand 43 is provided in the mask storing container 39. A mask is placed on the stand 43. Also, a gate valve 37 is provided on one side edge of the mask storing container 39. The gate valve 37 can be connected to a gate valve 35 of the mask chamber 13. The gate valve 37 is normally closed. |
