| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly sensitive and precise analytical method for perfluorides for a low concentration of the perfluorides and a mixture thereof. SOLUTION: A sample gas is concentrated by a cold trap tube 1 filled with a graphite carrier as an adsorbent using a cold trap method. Then, the concentrated sample gas is re-enriched in a tip portion of a column 3. The re-enriched sample gas is separated thereafter by a gas chromatograph 4 into components. Perfluorides are analyzed as to the separated components by a quadrupole mass spectrometer 5. The gas of the perfluorides is concentrated with high efficiency and good reproducibility, the perfluorides and the mixture thereof are component-separated, and highly precise and highly sensitive qualitative.quantitative analysis is carried out using the mass spectrometer 5, by this manner.
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