发明名称 |
Method for making UHP tungsten hexafluoride |
摘要 |
This invention is directed to a method for producing UHP tungsten hexafluoride by introducing an amount of crude tungsten hexafluoride to an evaporating process for separation into an amount of tungsten hexafluoride-containing volatile impurities and an amount of non-volatile metallic impurities; passing the amount of tungsten hexafluoride-containing volatile residue to a gas phase adsorption process for separation into an amount of semi-crude tungsten hexafluoride product and an amount of hydrogen fluoride non-volatile residue; and passing the amount of semi-crude tungsten hexafluoride product to a sparging system using UHP helium for separation into a non-volatile UHP tungsten hexafluoride product.
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申请公布号 |
US6103212(A) |
申请公布日期 |
2000.08.15 |
申请号 |
US19990358550 |
申请日期 |
1999.07.22 |
申请人 |
PRAXAIR TECHNOLOGY, INC. |
发明人 |
SALIM, SATERIA;HOLMER, ARTHUR EDWARD |
分类号 |
C01G41/04;(IPC1-7):C01B9/08 |
主分类号 |
C01G41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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