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发明名称
摘要
申请公布号
JP3077117(B2)
申请公布日期
2000.08.14
申请号
JP19930179087
申请日期
1993.07.20
申请人
发明人
分类号
B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65G49/07
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代理人
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