| 摘要 |
PROBLEM TO BE SOLVED: To stop vapor deposition when frequency reaches the prescribed one and to complete the regulation of frequency even in the process of measuring frequency and treating on a computer part in a system in which the regulation of the frequency of piezoelectric elements such as quartz oscillators. SOLUTION: This fine regulating vapor deposition system has a oscillating circuit 5 applying voltage to a work 11 to excite oscillation, furthermore transforming the oscillation of the work 11 into an electrical signal and amplifying the same, a measuring apparatus 6 measuring the oscillation frequency of the work oscillated by the oscillating circuit 5 and a vapor depositing part 4 provided with a vapor depositing source 12 and a shutter 13 opening and shuttering the passage of metallic vapor to the work for vapor-depositing metal on the work, a vapor deposition control part 3 heating and cooling the vapor depositing source, furthermore, driving the shutter and controlling the vapor deposition and a computer part 1 controlling the action of the vapor deposition control part 3 based on the frequency measured by the measuring apparatus. In this case, the computer part 1 houses the time and measured frequency measured by the measuring apparatus 6, introduces a vapor deposition rate from the data of the frequency and time fetched before and calculates the remaining time till the regulated objective frequency. |
