| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device allowing simultaneous display of optical image and excellent reflecting electron image having no noise. SOLUTION: When electron beam is two-dimensionally scanned on sample, reflecting electron is generated from the sample, and the sample is detected by a reflecting electron detector 6. A reflecting electron signal which is an output signal of the detector 6 is sent to a divider 9 after amplification by an amplifier 8. A voltage signal which light generated by a light source 11 is converted into voltage is sent from a light-voltage converting means 19 to the divider 9. The divider 9 divides the reflecting electron signal by the voltage signal, and sends its result to a controlling device 18. Signal caused by fluctuation in quantity of light generated by the light source 11 is eliminated by the divider 9, thereby optical image and excellent reflecting electron image can be displayed simultaneously on a screen of a cathode-ray tube 21.
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