| 摘要 |
PROBLEM TO BE SOLVED: To cut down the number of the parts of a piezoelectric actuator and improve its workability when attaching it onto a board, by supporting the peripheral edge of its vibrating plate through metallic rings to provide its vibrating plate in its synthetic-resin case, and by forming integrally with the case the supporting legs for attaching the case to the board. SOLUTION: When providing a vibrating plate 2 in a case comprising synthetic-resin lower and upper cases 3, 4, the peipheral edge of the vibrating plate 2 is sandwiched between metallic rings 5, 6. Then, a supporting legs 31 for attaching the lower case 3 to a board 14 are formed out of the synthetic resin integrally with the lower case 3. Accordingly, with the complete machining accuracies of the sandwiched surfaces of the vibrating plate 2 without bringing any friction into the sandwiched surfaces, a piezoelectric actuator having a stable vibrating characteristic can be manufactured with a good workability. Also, the thermal expansion coefficients of the inner rings 5, 6 can be made nearly equal to the one of the vibrating plate 2, and, it can be prevented that the sandwiched atate of the vibrating plate 2 is changed by the temperature of the actuator to change largely the vibrating characteristic of the vibrating plate 2. |
