PROXIMITY FIELD LIGHT PROBE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide an optical near field probe which is small in size and which significantly improves the detection efficiency for scattered light or the like produced by optical near field. SOLUTION: This optical near field probe has a structure of at least a semiconductor photodetector (photodiode PD) consisting of a first electrical conductivity type high concn. impurity layer 10, a first electrical conductivity type low concn. impurity layer 20 and a second electrical conductivity type impurity injected region 30, and a through hole 40 having a small aperture 50 formed in the photodiode. Therefore, the optical near field probe can be made small in size by integration of the minute aperture and the semiconductor photodetector (photodiode PD) which are conventionally proposed for the generation of the proximity field light, and the detection efficiency for scattered light produced by the optical near field can be increased.